PRODUCT

INNOMAX is a Manufacturer that rises through challenge and innovation.

SINGLE SPIN PROCESSOR
BACKSIDE SPIN ETCHER
Product Description
BACKSIDE SPIN ETCHER Is an Equipment for processing the rear side wafer.
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Specification

■ Features

1. Standard or Customized design by Customers' requirements

2. High throughput & Small footprint

3. Non drip function to prevent recontamination

4. Standby cleaning funtion to prevent crystallization of Dispenser inside

5. Chemical "Recycle" or "On shot drain" with chamber cup separation

6. Fully isolated wafer handling between befor and after processing

 

■ Specification


 

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