PRODUCT

INNOMAX is a Manufacturer that rises through challenge and innovation.

SINGLE SPIN PROCESSOR
METAL SPIN ETCHER
Product Description
METAL SPIN ETCHER is an Equipment for The process is carried out for removing the remaining sputter-formed metal thin films by chemical, etc. except for circuit parts such as UBM & Cu RDL produced by the plating process.
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Specification

■ Features

1. Standard or Customized design by Customers' requirements

2. High throughput & Small footprint

3. Selectives etching process for device side or back side

4. Non drip function to prevent recontamination

5. Standby cleaning funtion to prevent crystallization of Dispenser inside

6. Chemical "Recycle" or "On shot drain" with chamber cup separation

7. Fully isolated wafer handling between befor and after processing

 

■ Specification

 

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