PRODUCT

INNOMAX is a Manufacturer that rises through challenge and innovation.

WET-STATION
AUTO WET STATION (200mm Cassette type)
Product Description
Auto Wet Station is a batch type Equipment that automatically moves the cassette after chucking the 8" Wafer-only 2 Cassettes from the loader to the front robot, and proceeds with Chemical Bath, DIW Rinse Bath (QDR Bath), and Dryer process
CATALOGUE Contact us
Specification

■ Features

1. Standard or Customized design by customer's requirements

2. Patent wafer transfer robot for high throughput

3. Diverse experiences in Fab turn-key projects (Domestic & Oversea)

4. Reliable & User friendly software and hardware

5. Short lead time through standardized design

6. Low consumptions of DIW & Chemicals


 ■ Specification

 

CATALOGUE Contact us