PRODUCT

INNOMAX is a Manufacturer that rises through challenge and innovation.

WET-STATION
300mm Etch Hood Wet Station (Cassetteless type)
Product Description
300mm PR-STRIP WET STATION is a batch type Equipment that automatically moves the Wafer after changing the direction of the front robot to chuck by loading a 12" Wafer-only Foup and proceeds with Chemical Bath, DIW Rinse Bath (QDR Bath), and Dryer process
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Specification

■ Features

1. INNO MAX's own independent development equipment

2. Flexibility to process not only 300mm but also 200mm

3. Standard or Customized design by customer's requirements

4. Patent wafer transfer robot for high throughput

4. Reliable & User friendly software and hardware

5. Short lead time through standardized design

6. Low consumptions of DIW & Chemicals 


 ■ Specification

   

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