PRODUCT

INNOMAX is a Manufacturer that rises through challenge and innovation.

WET-STATION
Organic Cassetteless Wet Station (PR Strip, Etc.)
Product Description
Organic Cassetteless Wet Station is a batch type Equipment that loads 8" Wafer 2 Cassettes to separate Wafer and Cassette, and automatically moves Wafer by chucking the front robot, and proceeds with Chemical Bath, DIW Rinse Bath (QDR Bath), and Dryer pro
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Specification

■ Features

1. Standard or Customized design by Customers' requirements

2. Patent wafer transfer robot for high throughput

3. Divers experiences in Fab turn-key projects (Domestic & Oversea)

4. Reliable & User friendly software and hardware

5. Short lead time through standardized design

6. Low consumptions of DIW & Chemicals

 

■ Specification

 

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