PRODUCT

INNOMAX is a Manufacturer that rises through challenge and innovation.

LAB SERIES
SPIN LAB SERIES
Product Description
The Spin Lab Series is the best Single wafer spin processing Equipment for development purposes such as universities and research centers.
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Specification

 ■ Features

1. Different size of wafers can be processed (Options)

2. Possible to apply multi chemical in one chamber (3Chemicals)

3. Manual wafer loading or Automatic wafer loading (Options)

4. Up to 450mm Wafer & Mask (Thickness 100㎛)

5. Customized design is possible to meet customer's requirements

  ▶ Standard & Optional Nozzle (Nano, High pressure, Flux, Etc...)

6. Provide various types of Spin Chucks

  ▶ Vacuum Chuck, Bernoulli Chuck, Venturi Chuck, Edge Grip Chuck

 

■ Target Markets

1. QA or R&D Laboratories

2. Pilot Production lines

3. University / Institutes

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