PRODUCT

INNOMAX is a Manufacturer that rises through challenge and innovation.

WET-STATION
300mm Electroless Plating Wet Station (Cassette type)
Product Description
A 12" Wafer dedicated equipment for electroless plating is loaded with Foup, changed direction so that the front robot can chuck the Wafer using Reverse, and automatically moved to perform chemical bath, DIW radius bath (QDR bath), and dryer processes acc
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Specification

■ Features

1. INNO MAX's own independent development equipment

2. Flexibility to process not only 300mm but also 200mm

3. Standard or Customized design by customer's requirements

4. Patent wafer transfer robot for high throughput

4. Reliable & User friendly software and hardware

5. Short lead time through standardized design

6. Low consumptions of DIW & Chemicals


 ■ Specification

   

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