PRODUCT

INNOMAX is a Manufacturer that rises through challenge and innovation.

SINGLE SPIN PROCESSOR
SRD (WAFER SCRUBBER)
Product Description
SRD equipment for cleaning the Wafer surface after conducting the Incoming Wafer surface or Plasma Descum process.
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Specification

■ Features

1. Standard or Customized design by Customers' requirements

2. High throughput & Small footprint

3. Selectives etching process for device side or back side

4. Non drip function to prevent recontamination

5. Standby cleaning funtion to prevent crystallization of Dispenser inside

6. Fully isolated wafer handling between befor and after processing

 

■ Specification

  

CATALOGUE Contact us