도전과 혁신을 통하여 비상하는 회사
(주)이노맥스입니다.
■ Features
1. Standard or Customized design by Customers' requirements
2. High throughput & Small footprint
3. Selectives etching process for device side or back side
4. Non drip function to prevent recontamination
5. Standby cleaning funtion to prevent crystallization of Dispenser inside
6. Fully isolated wafer handling between befor and after processing
■ Specification