도전과 혁신을 통하여 비상하는 회사
(주)이노맥스입니다.
■ Features
1. Stand alone Type
3. Temperature Capability
1) DIW : Up to 90℃
2) AIR : Up to 150℃
▶ Can be improved depending on required process
4. Spin Capability
1) During the Spray cleaning : Up to 10RPM
2) During the Drying Process : Up to 110RPM
5. Particles
1) 4 added per in² on carrier
■ Specification
1. Cassette Size
1) 200mm Cassette & Cassette Box
2) 150mm Cassette & Cassette Box